Brief Introduction：
The spectral radiation standard and metrology beamline (Metrology Beamline) is a dedicated to the VUV-EUV-X-ray band. The metrology Beamline consists of a main line and a branch line. The main line uses a VLS grating (1400 L/mm, 300 L/mm) to cover the band of 1.2-50 nm; the branch line uses a C-T optical system and is equipped with two plane gratings (600 L/mm, 300 L/mm) to cover the band of 50-200 nm. Gas filtering can be used to improve the spectral purity. Each of the two lines has a reflectometer, which can carry out performance test on optical components (gratings, mirrors, multilayers, filters, etc.), and can also use standard detectors to calibrate the responsivity of detection equipment such as photodiodes and CCDs or the entire machine.
Parameters：
| Wavelength Range：1.2nm-200nm | Resolution：<1/800（Δλ/λ） |
| Photon Flux：1.2×1011@13.5nm，2.5×1010@120nm | Spot Size：3(h)×0.6(v)mm2（主线），4(h)×2(v)mm2（支线） |
| Reflectometer Vacuum：1×10-4Pa |
Staff：
| Wenjie Xu | Senior Engineer | 13167724556 xuwenjie@ustc.edu.cn |
Feiyun Zhao | Engineer | 18919647917 zhaofy@ustc.edu.cn |
Tonglin Huo | Engineer | 15255194810 huotl@ustc.edu.cn |
Hongjun Zhou | Senior Engineer | 0551-63602121 hjzhou@ustc.edu.cn |
| Zekai Chen | Master's Candidate | liar@mail.ustc.edu.cn |
Detailed Introduction:
