Endstation

Reflectometer

There is a reflectometer for each of the main line and branch line. The core of the reflectometer is two coaxial goniometers, with the sample placed in the center and the detector on the periphery, so as to achieve reflectivity measurement at different incident angles. The detector used is the AXUV100G photodiode. The sample stage has three-dimensional adjustment space, two dimensions for sample switching, and the other dimension can be adjusted according to the sample thickness to make the sample surface coincide with the light path. The reflectometer input light port is equipped with four-blade slits and various filters, which can be used to filter high-order harmonics.

Main line

Rotation Axis：Y

Optical path plane：X-Z

Displacement range：X：160mm；Y：160mm；Z：40mm

Reflectometer diameter：1m

Detector rotation radius：450mm

Experimental vacuum：1×10-4Pa

Branch line

Rotation Axis：Z

Optical path plane：X-Y

Displacement range：X：40mm；Y：40mm；Z：220mm

Reflectometer diameter：1m

Detector rotation radius：450mm

Experimental vacuum：3×10-4Pa