Spectral Radiation Standard and Metrology
Technical information
Source: Bend magnet, 5mrad (Horiz)X 1 mrad (Vert) acceptance angle
Energy range: 5-140nm
Flux: ~109-10Phot/s
Energy resolution: 300
Spot Size: 5mm(H)X1mm(V)
|
Source |
Bend magnet |
|
Acceptance angle |
5mrad (H)X 1 mrad (V) |
|
Photon energy range |
5-140nm (10-250eV) |
|
Photon flux |
~1011Phot/s@13nm@300mA |
|
Energy resolution |
~300 |
|
Endstation vacuum |
1x10-4Pa |
Endstation facility
• Reflectometer :
Reflectometer working model： Wavelength Scan, Fixed Sample Stage and Detector degree; Degree scan (detector 2q and sample stage q), Fixed Wavelength; Detector degree scan, Fixed wavelength and Sample Stage degree; Sample stage degree scan, Fixed Wavelength and Detector degree
• Rare gas ionization chamber ( as standard detector) : comparing standard and transfer detector.
• Detector: IRD AXUV100G
• Higher order suppressing filters: Si, Al, Mg, Zr, MgF2, LiF
Research area
Measuring optical element reflectivity, transmissivity and efficiency.
Comparing standard and transfer detector.
Measuring gas absorbtion cross section.
Contact
Hongjun ZHOU
0551-63602121
hjzhou@ustc.edu.cn
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